Patent Assignment
Reel/Frame 020471/0115
Assignment of Assignor's Interest
Recorded: 2008-02-06
Pages: 9
Assignors
AGUADO GRANADOS, AXEL
Executed: 2008-01-28
FOX, BENJAMIN AARON
Executed: 2008-01-28
GIBBS, NATHANIEL JAMES
Executed: 2008-01-28
MAKI, ANDREW BENSON
Executed: 2008-01-28
SHEETS, JOHN EDWARD, II
Executed: 2008-02-06
TIMPANE, TREVOR JOSEPH
Executed: 2008-01-28
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Method and Apparatus for Measurement and Control of Photomask to Substrate Alignment