Patent Assignment
Reel/Frame 020619/0559
Assignment of Assignor's Interest
Recorded: 2008-03-08
Pages: 4
Assignors
SUGISHIMA, KENJI
Executed: 2008-03-08
PATEL, SUKESH JANUBHAI
Executed: 2008-03-08
KAUSHAL, SANJEEV
Executed: 2008-03-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Autonomous Adaptive System and Method for Improving Semiconductor Manufacturing Quality