Patent Assignment
Reel/Frame 020695/0735
Assignment of Assignor's Interest
Recorded: 2008-03-25
Pages: 4
Assignors
DODOC, AURELIAN
Executed: 2007-11-19
EHRMANN, ALBRECHT
Executed: 2007-11-22
BLEIDISTEL, SASCHA
Executed: 2007-11-19
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical System of a Microlithographic Projection Exposure Apparatus
Application:
11/911,899 →
Publication:
US 2008/0170217