Patent Assignment
Reel/Frame 020699/0897
Assignment of Assignor's Interest
Recorded: 2008-03-25
Pages: 3
Assignee
TEGAL CORPORATION
2201 S. MCDOWELL BLVD., PETALUMA, CALIFORNIA, 94954
Covered Property
(1)
Stress Control in Reactive Sputtering
Application:
61/039,354 →