Patent Assignment
Reel/Frame 020745/0470
Assignment of Assignor's Interest
Recorded: 2008-03-28
Pages: 4
Assignor
VUKOVIC, MIRKO
Executed: 2008-03-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Distribution System and Method for Distributing Process Gas in a Processing System