Change of Name

Recorded: 2008-05-13 Received: 2008-05-14 Pages: 7

Assignor

LAMBDA PHYSIK AG

Executed: 2000-06-09

Assignee

COHERENT LAMBDA PHYSIK GMBH

HANS-BOECKLER-STRASSE 12, GOETTINGEN, DEX, D-37079, GERMANY

Covered Properties (2)

Stable Energy Detector for Extreme Ultraviolet Radiation Detection

Application: 10/218,690 →

Method and Apparatus for Generating High Output Power Gas Discharge Based Source of Extreme Ultraviolet Radiation and/or Soft X-Rays

Application: 10/109,581 →