Security Agreement

Recorded: 2008-05-16 Received: 2008-05-16 Pages: 6

Assignors

CELERITY, INC.

Executed: 2008-04-15

TENENBAUM CAPITAL PARTNERS, LLC

Executed: 2008-04-15

Assignee

OBSIDIAN, LLC

2951 28TH STREET, SUITE 1000, SANTA MONICA, CA, 90405, UNITED STATES

Covered Properties (11)

Surface mount heater

Application: 60/518,357 →

Modular Substrate Gas Panel Having Manifold Connections in a Common Plane

Application: 10/650,102 →

Methods and Apparatus for Pressure Compensation in a Mass Flow Controller

Application: 10/622,080 →

Variable Resistance Sensor with Common Reference Leg

Application: 10/622,004 →

Flow Sensor Signal Conversion

Application: 10/400,149 →

Method and Apparatus for Providing a Determined Ratio of Process Fluids

Application: 10/154,433 →

Fluid Flow System

Application: 10/147,427 →

System and Method for a Mass Flow Controller

Application: 10/131,603 →

Gas Panel

Application: 09/939,487 →

Method and apparatus for providing a determined ratio of process fluids

Application: 60/293,356 →

Method and Apparatus for Balancing Resistance

Application: 09/783,439 →