Patent Assignment
Reel/Frame 020969/0815
Assignment of Assignor's Interest
Recorded: 2008-05-07
Pages: 3
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Methods and Systems for Monitoring State of Plasma Chamber