Patent Assignment
Reel/Frame 020997/0503
Assignment of Assignor's Interest
Recorded: 2008-05-23
Pages: 4
Assignors
DHINDSA, RAJINDER
Executed: 2008-01-29
HUDSON, ERIC
Executed: 2008-01-29
MARAKHTANOV, ALEXEI
Executed: 2008-01-28
MORAVEJ, MARYAM
Executed: 2008-01-28
FISCHER, ANDREAS
Executed: 2008-01-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Dc Voltage Control on Rf-Powered Electrode