Patent Assignment
Reel/Frame 021015/0297
Assignment of Assignor's Interest
Recorded: 2008-05-29
Pages: 10
Assignors
SHANNON, STEVEN C.
Executed: 2008-05-15
RAMASWAMY, KARTIK
Executed: 2008-05-15
HOFFMAN, DANIEL J.
Executed: 2008-05-13
MILLER, MATTHEW L.
Executed: 2008-05-13
COLLINS, KENNETH S.
Executed: 2008-05-23
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method of Plasma Load Impedance Tuning for Engineered Transients by Synchronized Modulation of an Unmatched Low Power Rf Generator