Patent Assignment
Reel/Frame 021016/0031
Assignment of Assignor's Interest
Recorded: 2008-05-29
Pages: 10
Assignors
SHANNON, STEVEN C.
Executed: 2008-05-15
RAMASWAMY, KARTIK
Executed: 2008-05-15
HOFFMAN, DANIEL J.
Executed: 2008-05-13
MILLER, MATTHEW L.
Executed: 2008-05-13
COLLINS, KENNETH S.
Executed: 2008-05-23
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma Reactor with High Speed Plasma Load Impedance Tuning by Modulation of Different Unmatched Frequency Sources