Patent Assignment
Reel/Frame 021023/0075
Assignment of Assignor's Interest
Recorded: 2008-05-30
Pages: 8
Assignors
LI, SHIJIAN
Executed: 2008-03-03
RAMASWAMY, KARTIK
Executed: 2008-03-05
HANAWA, HIROJI
Executed: 2008-03-05
CHO, SEON-MEE
Executed: 2008-03-11
GALLO, BIAGIO
Executed: 2008-03-05
CHOI, DONGWON
Executed: 2008-03-07
FOAD, MAJEED A.
Executed: 2008-03-11
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma Immersion Ion Implantation Method Using a Pure or Nearly Pure Silicon Seasoning Layer on the Chamber Interior Surfaces