Patent Assignment
Reel/Frame 021073/0561
Assignment of Assignor's Interest
Recorded: 2008-06-10
Pages: 3
Assignors
TAKASAWA, SATORU
Executed: 2008-05-07
UKISHIMA, SADAYUKI
Executed: 2008-05-07
TANI, NORIAKI
Executed: 2008-05-07
ISHIBASHI, SATORU
Executed: 2008-05-07
Assignee
ULVAC, INC.
2500 HAGISONO,, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Sputtering Device and Film Forming Method