Patent Assignment
Reel/Frame 021145/0383
Assignment of Assignor's Interest
Recorded: 2008-06-13
Pages: 3
Assignors
SAWADA, IKUO
Executed: 2008-04-18
MATSUZAKI, KAZUYOSHI
Executed: 2008-04-17
TANAKA, TAKASHI
Executed: 2008-04-28
IWASHITA, MITSUAKI
Executed: 2008-04-28
MUNAKATA, MIZUE
Executed: 2008-05-22
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Coating Apparatus and Coating Method For Forming a Coating Under Laminar Flow Conditions
Application:
12/086,520 →
Publication:
US 2009/0162547
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.