ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2008-06-25 Received: 2008-06-25 Pages: 3

Assignors

SATOH, SHU

Executed: 2008-06-06

EISNER, EDWARD C.

Executed: 2008-06-09

SIERADZKI, MANNY

Executed: 2008-06-17

Assignee

AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES

Covered Application (1)