Patent Assignment
Reel/Frame 021237/0681
Assignment of Assignor's Interest
Recorded: 2008-07-15
Pages: 4
Assignors
FORSTER, JOHN C.
Executed: 2008-07-10
HOFFMAN, DANIEL J.
Executed: 2008-07-11
PIPITONE, JOHN A.
Executed: 2008-07-11
TANG, XIANMIN
Executed: 2008-07-10
WANG, RONGJUN
Executed: 2008-07-11
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Apparatus for Controlling Radial Distribution of Plasma Ion Density and Ion Energy at a Workpiece Surface by Multi-Frequency Rf Impedance Tuning