Patent Assignment
Reel/Frame 021324/0490
Assignment of Assignor's Interest
Recorded: 2008-07-31
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Support for High Throughput Chemical Treatment System