Patent Assignment
Reel/Frame 021332/0158
Assignment of Assignor's Interest
Recorded: 2008-07-29
Pages: 4
Assignor
OKITA, SHINICHI
Executed: 2008-07-18
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Processing Condition Determining Method and Apparatus, Display Method and Apparatus, Processing Apparatus, Measurement Apparatus and Exposure Apparatus, Substrate Processing System, and Program and Information Recording Medium