Patent Assignment
Reel/Frame 021467/0894
Assignment of Assignor's Interest
Recorded: 2008-09-02
Pages: 2
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006 OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Monitoring Method and Monitoring Apparatus for Semiconductor Production Equipment
Application:
12/143,234 →
Publication:
US 2008/0314315
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.