Assignment of Assignor's Interest

Recorded: 2008-08-29 Pages: 3

Assignors

MATSUURA, HIROYUKI

Executed: 2008-08-21

TAKAHASHI, TOSHIKI

Executed: 2008-08-21

FUKUSHIMA, KOHEI

Executed: 2008-08-21

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN

Covered Property (1)

Plasma processing apparatus

Application: 12/230,468 →

Publication: US 2009/0056877

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.