Patent Assignment
Reel/Frame 021538/0086
Assignment of Assignor's Interest
Recorded: 2008-09-16
Pages: 4
Assignors
LIU, JUNJUN
Executed: 2008-09-08
FAGUET, JACQUES
Executed: 2008-09-10
LEE, ERIC M.
Executed: 2008-09-15
TOMA, DOREL I.
Executed: 2008-09-08
YUE, HONGYU
Executed: 2008-09-08
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Dielectric Treatment Module Using Scanning Ir Radiation Source