Patent Assignment
Reel/Frame 021604/0665
Assignment of Assignor's Interest
Recorded: 2008-09-30
Pages: 5
Assignors
LIU, BENJAMIN Y.H.
Executed: 2008-09-18
MA, YAMIN
Executed: 2008-09-18
DINH, THUC M.
Executed: 2008-09-18
Assignee
MSP CORPORATION
5910 RICE CREEK PARKWAY, SUITE #300, SHOREVIEW, MINNESOTA, 55126
Covered Property
(1)
Method and Apparatus for Particle Filtration and Enhancing Tool Performance in Film Deposition
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.