Patent Assignment
Reel/Frame 021647/0523
Assignment of Assignor's Interest
Recorded: 2008-10-08
Pages: 6
Assignors
TALLAVARJULA, SAIRAJU
Executed: 2008-10-02
PRADHAN, KAILASH
Executed: 2008-10-07
NGUYEN, HUY Q.
Executed: 2008-10-06
LI, JIAN
Executed: 2008-10-06
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Apparatus for Calibrating Optical Path Degradation Useful for Decoupled Plasma Nitridation Chambers