Patent Assignment
Reel/Frame 021734/0478
Assignment of Assignor's Interest
Recorded: 2008-10-09
Pages: 3
Assignors
KOBAYASHI, YOICHI
Executed: 2008-09-22
TAKAHASHI, TARO
Executed: 2008-09-22
HIROO, YASUMASA
Executed: 2008-09-22
OGAWA, AKIHIKO
Executed: 2008-09-22
OHTA, SHINROU
Executed: 2008-09-22
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Monitoring Method and Polishing Apparatus