Patent Assignment
Reel/Frame 021736/0623
Assignment of Assignor's Interest
Recorded: 2008-10-24
Pages: 4
Assignors
ISHIZAKA, TADAHIRO
Executed: 2008-10-03
MIZUNO, SHIGERU
Executed: 2008-10-03
JOMEN, MIHO
Executed: 2008-10-04
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Forming Cobalt Nitride Cap Layers