Patent Assignment
Reel/Frame 021793/0766
Assignment of Assignor's Interest
Recorded: 2008-11-06
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithography Projection Optical System and Method for Manufacturing a Device
Application:
12/233,384 →
Publication:
US 2009/0052073