Patent Assignment
Reel/Frame 021863/0457
Assignment of Assignor's Interest
Recorded: 2008-11-19
Pages: 8
Assignors
URBANOWICZ, ADAM MICHAL
Executed: 2008-09-29
BAKLANOV, MIKHAIL
Executed: 2008-09-29
SHAMIRYAN, DENIS
Executed: 2008-10-13
DE GENDT, STEFAN
Executed: 2008-09-29
Assignees
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW (IMEC)
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
KATHOLIEKE UNIVERSITEIT LEUVEN, K.U.LEUVEN R&D
MINDERBROEDERSSTRAAT 8A, BUS 5105, LEUVEN, 3000, BELGIUM
Covered Property
(1)
Cleaning of Plasma Chamber Walls Using Noble Gas Cleaning Step
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.