Patent Assignment
Reel/Frame 021922/0730
Assignment of Assignor's Interest
Recorded: 2008-12-03
Pages: 2
Assignors
EISENMENGER, JOHANNES
Executed: 2008-10-15
STAMMLER, THOMAS
Executed: 2008-10-31
ELL, RICHARD
Executed: 2008-10-15
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Measuring Apparatus for a Projection Illumination System
Application:
61/101,518 →