Patent Assignment
Reel/Frame 021948/0130
Assignment of Assignor's Interest
Recorded: 2008-12-09
Pages: 5
Assignors
CHOU, CHUN-LI
Executed: 2008-10-30
JANG, SYUN-MING
Executed: 2008-10-30
SHIEH, JYU-HORNG
Executed: 2008-10-30
TING, CHIH-YUAN
Executed: 2008-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Wet Cleaning Stripping of Etch Residue After Trench and via Opening Formation in Dual Damascene Process