ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2008-12-10 Received: 2008-12-10 Pages: 4

Assignors

LEE, WILLIAM D.

Executed: 2008-12-04

RZESZUT, RICHARD J.

Executed: 2008-12-04

PUROHIT, ASHWIN M.

Executed: 2008-12-09

LAFONTAINE, MARVIN R.

Executed: 2008-12-10

Assignee

AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES

Covered Application (1)