Patent Assignment
Reel/Frame 022016/0534
Assignment of Assignor's Interest
Recorded: 2008-12-22
Pages: 3
Assignor
KAKEGAWA, TAKASHI
Executed: 2008-06-02
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus and Method, Gas Supply Device and Storage Medium