Patent Assignment
Reel/Frame 022232/0543
Assignment of Assignor's Interest
Recorded: 2009-01-27
Pages: 3
Assignors
FUKUSHIMA, MAKOTO
Executed: 2009-01-07
TOGAWA, TETSUJI
Executed: 2009-01-07
YASUDA, HOZUMI
Executed: 2009-01-07
NABEYA, OSAMU
Executed: 2009-01-07
SAITO, SHINGO
Executed: 2009-01-07
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Method and Polishing Apparatus