Patent Assignment
Reel/Frame 022349/0909
Assignment of Assignor's Interest
Recorded: 2009-03-05
Pages: 3
Assignor
BARTLETT, ALLEN J.
Executed: 2009-02-24
Assignee
BROOKS AUTOMATION, INC.
15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824
Covered Property
(1)
Process chamber apparatus with integrated cryopumping
Application:
61/199,794 →