Patent Assignment
Reel/Frame 022371/0174
Assignment of Assignor's Interest
Recorded: 2009-03-10
Pages: 3
Assignee
ADVANCED ENERGY INDUSTRIES
1625 SHARP POINT DR, FORT COLLINS, COLORADO, 80525
Covered Property
(1)
Delivered Energy Compensation During Plasma Processing
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.