Patent Assignment
Reel/Frame 022372/0034
Assignment of Assignor's Interest
Recorded: 2009-03-10
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gate Valve and Semiconductor Manufacturing Apparatus