Patent Assignment
Reel/Frame 022414/0121
Assignment of Assignor's Interest
Recorded: 2009-03-18
Pages: 3
Assignor
WI, SOON-IM
Executed: 2008-10-29
Assignee
NEW POWER PLASMA CO., LTD.
361-2, SIN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO 443-390, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Transfer Equipment and High Speed Substrate Processing System Using the Same