Patent Assignment
Reel/Frame 022476/0672
Assignment of Assignor's Interest
Recorded: 2009-03-31
Pages: 4
Assignors
ISHIZAKA, TADAHIRO
Executed: 2009-03-30
MIZUNO, SHIGERU
Executed: 2009-03-31
HOSHINO, SATOHIKO
Executed: 2009-03-30
NAGAI, HIROYUKI
Executed: 2009-03-30
CHIBA, YUKI
Executed: 2009-03-30
CERIO, FRANK M., JR.
Executed: 2009-03-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Selective Deposition of Metal-Containing Cap Layers for Semiconductor Devices