Patent Assignment
Reel/Frame 022489/0477
Assignment of Assignor's Interest
Recorded: 2009-04-01
Pages: 3
Assignor
KOSHIMIZU, CHISHIO
Executed: 2009-03-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Plasma Processing Method, and Computer Readable Storage Medium