Patent Assignment
Reel/Frame 022570/0342
Assignment of Assignor's Interest
Recorded: 2009-04-21
Pages: 3
Assignor
SATAKE, KEIGO
Executed: 2009-01-23
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINOTO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Liquid Mixing Apparatus and Method, Substrate Processing Apparatus, and Storage Medium