Patent Assignment
Reel/Frame 022636/0513
Assignment of Assignor's Interest
Recorded: 2009-05-05
Pages: 3
Assignor
AVIZA TECHNOLOGY LIMITED
Executed: 2009-03-10
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Treating a Semi-Conductor Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.