Patent Assignment
Reel/Frame 022713/0063
Assignment of Assignor's Interest
Recorded: 2009-05-20
Pages: 4
Assignors
TSENG, CHIH-CHIANG
Executed: 2009-02-24
CHEN, YUNG-LONG
Executed: 2009-02-24
HUANG, LIANG-CHIEH
Executed: 2009-02-24
HUANG, YI-WEN
Executed: 2009-02-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Slurry System for Semiconductor Fabrication