Patent Assignment
Reel/Frame 022717/0833
Assignment of Assignor's Interest
Recorded: 2009-05-21
Pages: 2
Assignor
ADAMS, DOUGLAS
Executed: 2008-02-06
Assignee
SEMEQUIP, INC.
34 SULLIVAN ROAD, NORTH BILLERICA, MASSACHUSETTS, 01862
Covered Property
(1)
Vapor Delivery System Useful with Ion Sources and Vaporizer for Use in Such System