Patent Assignment
Reel/Frame 022761/0830
Assignment of Assignor's Interest
Recorded: 2009-06-01
Pages: 3
Assignors
IIZUKA, HACHISHIRO
Executed: 2009-03-19
KIRIISHI, FUMIKO
Executed: 2009-03-19
KOMIYAMA, TSUYOSHI
Executed: 2009-03-19
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Shower Head and Substrate Processing Apparatus