Patent Assignment
Reel/Frame 022832/0180
Assignment of Assignor's Interest
Recorded: 2009-06-16
Pages: 6
Assignors
HORSKY, THOMAS N.
Executed: 2009-05-19
HAHTO, SAMI K.
Executed: 2009-05-19
GOLDBERG, RICHARD
Executed: 2009-05-17
Assignee
SEMEQUIP, INC.
34 SULLIVAN ROAD, NORTH BILLERICA, MASSACHUSETTS, 01862-2000
Covered Property
(1)
Multi Mode Ion Source