Patent Assignment
Reel/Frame 023005/0816
Assignment of Assignor's Interest
Recorded: 2009-07-24
Pages: 3
Assignee
CABOT MICROELECTRONICS CORPORATION
870 NORTH COMMONS DRIVE, AURORA, ILLINOIS, 60504
Covered Property
(1)
Methods and apparatus for chemical-mechanical polishing utilizing low-solids abrasive compositions
Application:
61/201,001 →