Patent Assignment
Reel/Frame 023092/0992
Assignment of Assignor's Interest
Recorded: 2009-08-12
Pages: 2
Assignor
SUPERCRITICAL SYSTEMS, INC.
Executed: 2009-08-06
Assignee
TOYKO ELECTRON LIMITED
AKASAKA BIZ TOWER,3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and apparatus for selectively filtering residue from a processing chamber
Application:
10/990,162 →
Publication:
US 2006/0102282
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.