Patent Assignment
Reel/Frame 023159/0547
Assignment of Assignor's Interest
Recorded: 2009-08-27
Pages: 4
Assignors
ABE, YO
Executed: 2009-08-03
TAKAHASHI, KIICHI
Executed: 2009-08-03
SATO, JUNYA
Executed: 2009-08-03
MOTODATE, YOSHINOBU
Executed: 2009-08-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Thermal Processing Apparatus, Thermal Processing Method, and Storage Medium