Patent Assignment
Reel/Frame 023168/0947
Assignment of Assignor's Interest
Recorded: 2009-08-31
Pages: 5
Assignors
KATO, HITOSHI
Executed: 2009-08-24
OBARA, KAZUTERU
Executed: 2009-08-24
HONMA, MANABU
Executed: 2009-08-24
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Deposition Apparatus, Film Deposition Method, Computer Readable Storage Medium for Storing a Program Causing the Apparatus to Perform the Method