Patent Assignment
Reel/Frame 023534/0632
Assignment of Assignor's Interest
Recorded: 2009-11-18
Pages: 4
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Modulated Ion-Induced Atomic Layer Deposition (Mii-Ald)