Patent Assignment
Reel/Frame 023885/0995
Assignment of Assignor's Interest
Recorded: 2010-02-02
Pages: 3
Assignor
VERMEULEN, JOHANNES PETRUS MARTINUS BERNARDUS
Executed: 2010-01-12
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method with Bearing to Allow Substrate Holder to Float with Respect to Substrate Table